Specifications:
X * Y axis travels: 200 x 150 mm
XY axis accuracy: E2=(3.5+6L/1000) μ m
Z-axis travel: 150mm
Z-axis accuracy: E1=(7.0+8L/1000) μ m
XYZ axis glass scale resolution: 1.0 μ m
Magnification (20 inches display): 35x~175x
Load: 23kg