Specifications:
X/Y/Z axes travel: 800/1000/600mm
Dx/Dz/Dz1 measuring space: 934/144/794mm
Load: 500kg
Machine weight: 1074kg
MPEe: 3.0+L/300μm
MPEp: 3.5μm
Glass scale resolution: 0.078μm
Space moving speed: 520mm/s
Space moving acceleration :1730mm/s2
Temperature: 20±2℃
Humidity: 45%-75%