Specifications:
Applicable controller: VR-3000K
Observation and measurement range:
(1) Wide field mode:
Magnification on 15 inches Monitor 12x
Transverse (H) 24mm
Longitudinal (V) 18mm
Magnification on 15 inches Monitor 25x
Transverse (H) 12mm
Longitudinal (V) 9mm
Magnification on 15 inches Monitor 38x
Transverse (H) 8mm
Longitudinal (V) 6mm
Magnification on 15 inches Monitor 50x
Transverse (H) 6mm
Longitudinal (V) 4.5mm
(2) High magnification mode:
Magnification on 15 inches Monitor 40x
Transverse (H) 7.6mm
Longitudinal (V) 5.7mm
Magnification on 15 inches Monitor 80x
Transverse (H) 3.8mm
Longitudinal (V) 2.9mm
Magnification on 15 inches Monitor 120x
Transverse (H) 2.5mm
Longitudinal (V) 1.9mm
Magnification on 15 inches Monitor 160x
Transverse (H) 1.9mm
Longitudinal (V) 1.4mm
Zoom: 1x to 4 x
Measurable height:
(1 Wide field mode: 10mm (± 5mm)
(2) High magnification mode: 1mm (± 0.5mm) * 1
Display resolution: 0.1 µ m * 2
Repetition accuracy（ б) :
(1) Height measurement: 0.5µm*3
(2) Width measurement: wide field mode: 1 µ m/high magnification mode: 0.5 µ m * 3
Measurement accuracy:
(1) Height measurement: ± 3 µ m * 3
(2) Width measurement: wide field mode: ± 5 µ m/high magnification mode: ± 2 µ m * 3
Connection function: fully automatic (XY automatic control+auto focus) measurement * 4 automatic adjustment, automatic template analysis * 4
Stage:
XY travel: 184 × 88 mm (electric)
Z travel: 90 mm (electric)
Rotating structure: ± 180 ° (test sample rotating stage)
Inclined structure: more than ± 30 °
Operating distance: 75 mm
Image receiving component: 1-inch,4-megapixel and monochrome C-MOS
Light transmitting lens: twin telecentric lens x2
Light receiving lens: twin telecentric lens
Lighting system:
(1) Light source for observation: annular LED light (red, green, blue)
(2) Light source for measurement: white LED light
Image size: 1024 x 768 pix, 2048 x 1536 pix
Data processing section: dedicated PC designated by KEENS (OS is Windows7) * 5
Supply voltage: 100 to 240 VAC ± 10%, 50/60 Hz
Power consumption: 150 VA
Environmental resistance:
Ambient temperature:+15 to +30 ℃
Relative humidity: 35 to 80% RH (incondensable)
Weight: 28.0 kg
