Specifications:
Maximum workpiece diameter :Φ480mm
Maximum workpiece height :500mm
Maximum measurement depth :160mm
Maximum measuring diameter: medium 435mm
Maximum workpiece weight :75Kg
500mm column
Column height :500mm
The linear degree error of the full height of the column :0.3μm/500mm
Any 100mm straight line degree error :0.15μm/100mm
Parallel degree of vertical axis to spindle :1μm/500mm
Position control :±5μm
moving rate :0.25-20mm/ s (moving), 0.25-20mm/ s (measuring), 0.5-5mm/ s (contact)
Position resolution :0.25μm
Sample data point :200000(optional)
