Specifications:
X-axis travel: 100mm
Y-axis travel: 100mm
Z-axis travel: 100mm
Maximum workpiece weight: 5kg
Resolution:
Ceramic glass scale (X/Y/Z axes): 0.25um
Touching type sensor system: MPE (um) 0 25+llmm) / 666)
Optical sensor system: MPE：0.3um和MPE：0.7um
Touching type sensor system:
Silicon base dynamic resolution: 0.001um
Probe force: 0.5N/um
Optical sensor system:
CCD camera based on VISCAN magnification：10X
Reflected light: LED loop (green 575nm）
Transmision light: white
