Specifications:
X*Y*Z axis travel: 100*100*100mm
Worktable load: 5kg
X/Y/Z axes detection accuracy: 0.25u
Contact measurement: MPE(um)0.25+1nm
Projection measurement: MPE0.3uz
Resolution: 0.001um
Probe force: 0.5N/um
Catoptric light：LED
